Zhuzhou Ruideer Metallurgy Equipment Manufacturing Co.,Ltd
Swiss Precision, German Quality, Chinese Intelligent Manufacturing
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This equipment is used for silicon carbide coating of carbon-based/ceramic-based materia,especially deposition of silicon carbide on the surface of the semiconductor epitaxial susceptor and etching ring.
Epitaxial base, a high-purity graphite disk, with a circular groove on it to fix the wafer substrate.After placing them in the furnace, a layer of crystal film will grow on the surface of the substrate, which is the epitaxial layer.Wafer processes such as lithography and ion implantation are all carried out on the epitaxial layer.
The epitaxial base made of graphite obviously cannot meet the ultra-high cleanliness requirements in the semiconductor process.For this reason, we need to use chemical vapor deposition on the base to wrap a layer of dense silicon carbide film.
Optional Configuration
1. Furnace door: screw/hydraulic/manual elevation type; swing opening/parallel opening(large size furnace door); manual tight/auto lock-ring tight
2. Furnace vessel: all carbon steel/inner layer stainless steel/all stainless steel
3. Furnace hot zone: soft carbon felt/soft graphite felt/rigid composite felt/ CFC
4. Heating element and muffle: isostatic press graphite/high purity, strength and density graphite/fine size graphite
5. Process gas system: volume/mass flow-meter;
6. Thermocouple: K type/N type/C type/S type
• Design standards
The equipment is designed in accordance with the pressure vessel requirements of the Quality and Technical Supervision Bureau, and is qualified after pressure testing and shipped. The electrical design and construction meet national standards.
• Installation pre-test and pre-acceptance
The equipment is fully assembled in our factory, including all pipelines, vacuum pipelines, process gas pipelines, cooling water pipelines, compressed air pipelines, etc. Pre-testing can be carried out after installation. At the customer site, pipelines other than the equipment are provided by the customer. The installation also includes the connection of all cables. At the customer site, the main cable connecting the power cabinet is provided by the customer. After installation, we conduct vacuum and positive pressure leakage tests on the entire equipment, as well as mechanical and electrical function tests.
• Disassembly and transportation
The equipment will be disassembled in several large parts, packed in a standardized manner, and loaded into the transport vehicle.
• Customer site installation and commissioning
The Redel after-sales engineer will lead the team to complete commissioning, product trial burning and other work within 20 working days. The customer needs to make appropriate preparations and provide the necessary tools, such as hoisting and lifting equipment. And provide installation personnel support (it is recommended to have 1 mechanical personnel and 1 electrical personnel).
• Final acceptance
After installation and commissioning, the equipment can be finally accepted in accordance with the requirements of the technical contract.
• Training
Our after-sales engineers will provide a systematic and complete on-site training, including operation, maintenance, troubleshooting, etc.
• Technical data delivery
To ensure safe operation and equipment maintenance, the following technical data will be provided to customers:
1. Equipment installation layout
2. User manual
3. Spare parts list
4. Electrical drawings
5. Component manual
FAQ
Q: Are you a factory or trading company?
A:We are China leading high-temperature vacuum furnace manufacturer with over 10 years’ experience.
Q: Do you have customization or OEM service??
A:Yes,we have powerful R&D team and high-tech equipment.So we can not only supply the regular model,but also the customizable furnace as the repuirment of our clients.
Q:What's your advantage?
A:
l Quick response to your enquiry
l High quality control
l Stable supply chain
l Timely delivery
l Excellent after-sales service